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Flow Measurement of Gases in Semiconductor Production

Flow Measurement of Gases in Semiconductor Production

A wide range of different gases, such as nitrogen, argon, helium or even compressed air are required for the production process of electronic components.

Most of these industrial gases are not produced onsite but procured externally which means they involve considerable costs. In addition to that, a great deal of energy must be generated for the production of compressed air – which also implies significant costs. In order to identify the primary consumers and therefore optimise operation of the production plants, the various volume flow rates must be measured first of all.

The portable FLUXUS G601 ultrasonic flow meter proved to be the ideal measuring system for a semiconductor producer:
Due to the non-invasive measuring technology, there is no need to open existing pipes in order to set up temporary flow measuring points and therefore no interruption of production. Since the clamp-on ultrasonic transducers are simply mounted onto the outside of the pipe and don’t get into any contact with the gas flowing inside, there is absolutely no risk of contaminating the high purity media. As a result, the clamp-on ultrasonic system can also be used with out any worries in cleanroom environments. In addition, there is also no risk of leakage associated with FLEXIM's non-invasive measuring technology.

FLUXUS G601 users particularly appreciate its simple and practical manageability, its reliability and its exceptional flexibility and versatility. When the transducers are connected, they are automatically detected by the measuring transmitter and the stored data (transducer type, serial number, calibration data) are read. This makes it easier to set up the measuring point and ensures accuracy and traceability of the measured values. The portable FLUXUS G601 as well as the permanent FLUXUS G721 or G704CA ultrasonic system is suitable for non-invasive flow measurement of a wide range of gases, as well as compressed air and can be used on almost all pipe materials.

Advantages

  • Reliable, precise measurement
  • Fast installation and commissioning
  • Non-invasive measurement, therefore:
    • no interruption of production
    • no risk of contaminating high purity media
    • no risk of leakages
  • Maximum flexibility and versatility: a single measuring system for a wide range of applications
  • Transducers are automatically detected when connected, calibration data is transferred, zero point adjustment is not required
  • Simple, intuitive parameterization

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