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Flow Measurement of Gases in Semiconductor ProductionFlow Measurement in Cleanroom Environments Post-etch Residue Removal

Semiconductor Industries

Measurement with no media contact

The liquids employed during the production steps of semiconductors and printed circuit boards (PCB) are either corrosive or ultra-pure. FLEXIM's clamp-on flow meters are ideal solutions for these tasks as they are never in direct contact with the flowing medium.

Moreover, being completely metal free and employing special mounting fixtures, the metering system is perfectly suited for accurate meaurements of even the lowest flow rates at flexible tubings with absolutely no risk of potential contamination of the media streams. Other clean room environment applications are solved by our range of PIOX Process Refractometers, e.g. when monitoring the post-etch residue removal process.